Opening Remarks: 50 Years of ALD
Dr. Tuomo Suntola
During ALD 2024 we will be celebrating the 50 year anniversary of the groundbreaking work on ALD by Dr. Tuomo Suntola and his coworkers who filed the first patent on Atomic Layer Epitaxy in 1974. Dr. Tuomo Suntola will present the opening remarks of the ALD 2024 conference.
Plenary Speaker
Dr. Ivo J. Raaijmakers, ASM, The Netherlands
Dr. Raaijmakers is currently Corporate Vice President and Executive Advisor of ASM International NV (“ASM”), focusing on innovation management, new technologies and government relations. He started his career in 1982 at the Philips Research Labs in the Netherlands. He moved to the USA in 1988, where he held various positions in semiconductor technology development and R&D management at Philips, Novellus, and Applied Materials. Dr. Raaijmakers joined ASM in 1996 in its ASM America subsidiary and was appointed CTO in 1999, based out of ASM’s headquarter in the Netherlands, a position he held until 2022. Read More
ALE Plenary Speaker
Eric Liu, Tokyo Electron America, USA
Eric Liu earned his bachelor’s and master’s degrees in material science and engineering from Penn State University and Cornell University, respectively. He later completed his Ph.D. in Nanoscale Engineering from SUNY Poly. In 2009, he began his career at TSMC and later joined TEL Technology Center in America (TTCA) in 2015. Currently, he serves as a process engineer manager specializing in patterning for sub-3nm node applications. His research interests include single and multiple pattering methods, process integration, and the demonstration of Design-Technology-Co-Optimization (DTCO). Eric holds over 20 US patents and actively contributes to publications and presentations. Read More